基于钛和氮化铬的纳米结构电弧- pvd涂层( Nanostructured Arc-PVD coatings based on titanium and chromium nitrides )

IV Blinkov AO Volkhonskii YV Konyukhov Practical, Experimental/ adhesion aluminium compounds chromium compounds crystallites cutting cutting tools elastic moduli hardness micromechanics nanofabrication nanostructured materials steel titanium compounds vacuum deposited coatings vacuum deposition X-ray photoelectron spectra/ nanostructured arc-PVD coatings titanium nitrides multicomponent nanostructured coatings crystallite size arc physical vacuum deposition phase composition deposition parameters bias potential arc current chromium cathode chromium nitride phases hardness elastic modulus microstrains chemical heterogeneity adhesion strength high resistance coefficient discontinuous cutting continuous cutting 38KhNMA steel hard-alloy cutting tool TiCrAlN/ A6855 Thin film growth, structure, and epitaxy A6860 Physical properties of thin films, nonelectronic A6865 Low-dimensional structures: growth, structure and nonelectronic properties A8115G Vacuum deposition A8116 Methods of nanofabrication and processing A8140J

采用电弧物理真空沉积技术，以Ti-Cr-Al-N氮化物为基体，形成了晶粒尺寸为10～100nm的多元纳米结构镀层。得到了镀层的结构和相组成与沉积参数，即施加在基体上的偏压电位和铬阴极上的电弧电流的依赖关系。涂层中氮化铬相的出现伴随着晶粒尺寸的减小。镀层的硬度（32 GPa）和弹性模量（700 GPa）是由镀层中的微晶尺寸和化学不均匀性引起的微应变（0.74%）共同决定的。在90N时,镀层的结合强度得到了估计。在对38KHNMA钢进行连续（5.1）和不连续（5.7）切削时,镀层的硬质合金刀具具有较高的阻力系数。

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